Method and apparatus for treating a waste gas containing fluorine-containing compounds

摘要

An apparatus for treatment of a waste gas, containing fluorine-containing compounds, comprises: a solids treating device for separating solids from the waste gas; an addition device for adding H₂ and/or H₂O, or H₂ and/or H₂O and O₂, as a decomposition assist gas to the waste gas leaving the solids treating device; a thermal decomposition device that is packed with gamma-alumina heated at 600 - 900 ° C., and which thermally decomposes the waste gas to which the decomposition assist gas has been added; an acidic gas treating device for removing acidic gases from the thermally decomposed waste gas; and channels or lines for connecting these devices in sequence. The apparatus preferably includes an air ejector which is capable of adjusting an internal pressure of the apparatus.