发明名称 AlGaInN Single-Crystal Wafer
摘要 AlGaInN single-crystal wafer with alleviated cracking and improved utilization rate and cost effectiveness. A hexagonal Al<SUB>x</SUB>Ga<SUB>y</SUB>In<SUB>1-(x+y)</SUB>N(0<x<=1, 0<=y<1, x+y<=1) single-crystal wafer, characterized in that the wafer has a thickness T(cm) and a principal face with a surface area S(cm<SUP>2</SUP>), the area S and thickness T satisfying the conditions S>=10 cm<SUP>2 </SUP>and 0.006 S>=T>=0.002 S.
申请公布号 US2005268842(A1) 申请公布日期 2005.12.08
申请号 US20050908922 申请日期 2005.06.01
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 FUJIWARA SHINSUKE
分类号 H01L21/02;C30B23/00;C30B29/40;(IPC1-7):C30B23/00;C30B25/00;C30B28/12;C30B28/14 主分类号 H01L21/02
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