| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a new photo acid generator in which the light-sensitive wavelength of the photo acid generator is fitted to the wavelength of the mercury lamp and the adhesion to a metal such as copper is increased and provide a high sensitivity photo sensitive resin composition. <P>SOLUTION: The compounds generating acid with actinic rays have the structure represented by general formula (1) or general formula (2) (wherein R<SP>1</SP>and R<SP>2</SP>are each a univalent organic group of 1 to 30 carbon number; R<SP>2</SP>, R<SP>4</SP>are each a hydroxy group, cyano group, nitro group, amino group, ester group, carboxy group, 1-10C alkyl group, phenyl group or naphthyl group; X, D are each N or CH and Z is C or SO). <P>COPYRIGHT: (C)2006,JPO&NCIPI |
