| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning device capable of adequate adjustment even in a state where a process chamber and a vacuum chamber are kept at atmospheric pressure. SOLUTION: The positioning device 110 permits a pressure difference generated at upper and lower surfaces of a moving block 30 to be kept unchanged at the time of actual operation and at the time of an evaluation test. This is because opposite side surfaces of a first partition wall W1 and opposite side surfaces of a second partition wall W2 are disposed at a coincident position while putting the moving block 30 therebetween. An evaluation following actual operation is therefore ensured by implementing an evaluation test while keeping the process chamber P and the vacuum chamber R at atmospheric pressure, so that it is possible to sharply save a labor of an adjustment. COPYRIGHT: (C)2006,JPO&NCIPI |
