| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of processing a chuck table in a processing apparatus wherein a distance between the holding surface of the chuck table and a cutting tool can be unified over the entire region of the holding surface. SOLUTION: The processing apparatus comprises the chuck table having the holding surface for holding a plate-like object, a chuck table moving mechanism for moving the chuck table, a cutting unit containing the cutting tool for cutting and truing up heights of a plurality of electrodes formed in a projecting state on the surface of a plate-like object held by the chuck table, and a cutting unit feeding mechanism for making back and forth the movement of the cutting unit in a direction perpendicular to the holding surface of the chuck table. In processing the chuck table in the processing apparatus, the chuck table is moved to a processing area, and then the holding surface of the chuck table is cut by the cutting unit. COPYRIGHT: (C)2006,JPO&NCIPI |
