| 摘要 |
PROBLEM TO BE SOLVED: To detect a defect of a colored coating such as a color filter. SOLUTION: In this imaging method, light a is irradiated toward an inspection object 1 on which a coating colored in two or more colors, and reflected light b thereof is allowed to pass an interference filter and then received by an imaging part, to thereby image the object. In the method, color separation of the reflected light b into each color light is performed, and each color light is allowed to pass an interference filter in the same color as each color respectively, and each color light passing each interference filter is received by the imaging part, respectively. Hereby, an image of an interference fringe having high contrast can be acquired, and even a defect on a colored coating having a minute area can be inspected. Since the interference fringe is acquired in each color by color separation of the reflected light b, defects can be inspected simultaneously with respect to all colors of the colored coating. COPYRIGHT: (C)2006,JPO&NCIPI |
