| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a crystal oscillator, with which a manufacture yield is improved and productivity can be improved. SOLUTION: A crystal vibrator is manufactured by a step A of mounting an annular conductor pattern on the surface of a substrate and packaging a crystal vibrating element, including a vibrating electrode on its upper surface inside the conductor pattern; a step B of applying a voltage to the crystal vibrating element for thickness-shear vibration, simultaneously irradiating a surface of the vibrating electrode and a surface of the conductor pattern with ion beams, while measuring a frequency of the crystal vibrating element to adjust the frequency, and removing an oxide film on the surface of the conductor pattern; and a step C of bonding a metallic lid to the conductor pattern so as to cover the crystal vibrating element. COPYRIGHT: (C)2006,JPO&NCIPI
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