发明名称 Fluid dispensing and drop-on-demand dispensing for nano-scale manufacturing
摘要 The present invention is directed to a method for dispensing a total volume of liquid on a substrate, the method including, inter alia, disposing a plurality of spaced-apart droplets on a region of the substrate, each having an unit volume associated therewith, with an aggregate volume of the droplets in the region being a function of a volume of a pattern to be formed thereat.
申请公布号 US2005270312(A1) 申请公布日期 2005.12.08
申请号 US20050143092 申请日期 2005.06.02
申请人 MOLECULAR IMPRINTS, INC. 发明人 LAD PANKAJ B.;MCMACKIN IAN M.;TRUSKETT VAN N.;SCHUMAKER NORMAN E.;SREENIVASAN SIDLGATA V.;VOTH DUANE;SCHUMAKER PHILIP D.;FLETCHER EDWARD B.
分类号 B41J2/01;B41J3/28;B41J3/407;G03F7/00;H01L51/40;(IPC1-7):B41J2/01 主分类号 B41J2/01
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