CIRCUIT BOARD INSPECTING APPARATUS AND CIRCUIT BOARD INSPECTING METHOD

摘要

A circuit board inspecting apparatus and a circuit board inspecting method are provided for performing highly reliable electrical inspection to an object to be inspected, or a circuit board to be inspected, even when the circuit board has a fine pitch microelectrode, and for efficiently aligning an inspection jig and the circuit board to be inspected. In a middle pin unit (31) between a circuit board side connector (21) and a tester side connector (41), a first insulating board (34) and a middle holding board (36) are fixed by a first supporting pin (33), a second insulating board (35) and a middle holding board (36) are fixed by a second supporting pin (37), and a first abutting and supporting position of the first supporting pin (33) to the middle holding board (36) and a second abutting and supporting position of the second supporting pin (37) to the middle holding board (36) are arranged at different positions on a middle holding board projection plane projected in a thickness direction of the middle holding board (36). Then, in the middle pin unit (31), an image pickup device, such as a CCD camera (91), is arranged and the inspection jig (11) and the circuit board (1) to be tested are aligned.