发明名称 SEMICONDUCTOR DEVICE AND METHOD OF PRODUCING THE SAME
摘要 A semiconductor device having a highly resistant metal film and a method of producing such a semiconductor device, which includes a metal film formed on an electrode pad, and a protection film formed in an area where he metal film does not exist. The metal film has a greater thickness on its peripheral end portion in contact with the protection film. The semiconductor device can be produced by a semiconductor production method including the steps of activating the surface o the electrode pad with a chelating solution containing glycine and a compound having a metallic element as nuclei, and forming a metal film by electroless metal plating.
申请公布号 KR100534219(B1) 申请公布日期 2005.12.08
申请号 KR20000011555 申请日期 2000.03.08
申请人 发明人
分类号 H01L21/60;H01L23/52;H01L21/288;H01L21/3205;H01L23/485 主分类号 H01L21/60
代理机构 代理人
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