| 摘要 |
PROBLEM TO BE SOLVED: To provide a cassette for a large-sized substrate capable of stably supporting the substrate regardless of the bending of the substrate. SOLUTION: Side face support posts 130 are provided in regions positioned on both sides of the substrate 1. On respective side face support posts 130, substrate supporting members 150 for receiving linearly the substrate 1 from the undersurface side and supporting it are provided in regions near both sides of the substrate 1 along the carrying-in and -out direction of the substrate 1. COPYRIGHT: (C)2006,JPO&NCIPI |
