| 摘要 |
PROBLEM TO BE SOLVED: To provide an inductor having low noise and a low loss without reducing its resonance frequency. SOLUTION: In the inductor wiring formed on a silicon substrate, there are formed a silicon layer having resistance lower than that of the silicon substrate, an alloy layer made of silicon, metal and the like in the vicinity of the inductor wiring which is present on the silicon substrate. Further, it is made possible that the silicon layer having low resistance is not formed extremely under the inductor wiring. COPYRIGHT: (C)2006,JPO&NCIPI
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