| 摘要 |
PROBLEM TO BE SOLVED: To provide a floating surface protective film having excellent corrosion resistance, electric resistance and mechanical wear resistance in an ultrathin film. SOLUTION: This floating surface protective film having excellent corrosion resistance, electric insulation and mechanical wear resistance in an ultrathin film is realized by arranging a silicon nitride thin film having high density, high electric resistance, chemical stability and high adherence to a substrate at the lowest layer of the floating surface protective layer and arranging a film composed of tetrahedral amorphous carbon and nitrogen at the highest layer of the floating surface protective film. COPYRIGHT: (C)2006,JPO&NCIPI
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