| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance sensor manufacturable inexpensively, and having excellent measuring accuracy. SOLUTION: Since a thickness increasing layer 32 is fixed to an effective domain 28 to heighten its rigidity, the peripheral part 34 of a diaphragm 12 is deformed exclusively, and the inside of the effective domain 28 is kept approximately flat. Since the peripheral part 34 is formed concentrically with the diaphragm 12, the deformation quantity on a position at the same distance from the center of the diaphragm 12 becomes uniform. Hereby, since the effective domain 28 of the diaphragm 12 and a movable side electrode 26 fixed thereto are separated from a fixed side electrode 24, while keeping the parallel state thereto, linearity of a capacitance change to a pressure change is enhanced. COPYRIGHT: (C)2006,JPO&NCIPI
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