| 摘要 |
PROBLEM TO BE SOLVED: To form a uniform coating film on a coating object having projecting and recessed parts on the surface. SOLUTION: A coating film forming apparatus is provided with a spray apparatus for spraying a coating liquid on the coating object 11 having the projecting and recessed parts 18 on the surface and a work stage 10 on which the coating object 11 is placed, wherein, when a film condition detection part 12 detects a part where a coating film having a required film thickness is not formed on the surface of the coating object 11, a controller 20 controls a nozzle height adjusting means 21, a spray pressure adjusting means 22, a spray quantity adjusting means 23, a drive part 24 and a temperature adjusting means 25 based on the information from both of a particle condition detecting part 4 and an object temperature detecting part 13, and also based on the shape of the projecting and recessed part 18 of the coating object and the prerecorded information, so that the coating is performed again. COPYRIGHT: (C)2006,JPO&NCIPI
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