| 发明名称 |
METHOD OF PLANNING TASK IN MACHINE, METHOD OF CONTROLLING MACHINE, SUPERVISORY MACHINE CONTROL SYSTEM, LITHOGRAPHIC APPARATUS, LITHOGRAPHIC PROCESSING CELL AND COMPUTER PROGRAM |
| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for planning a task to be performed in a machine. <P>SOLUTION: In the method, a scheduling problem that can be solved by an automated scheduler is created by deriving a precedence graph by linking subsidiary tasks to a sequence of key tasks. In the event of a trigger such as an order for new work or a machine exception, work can be retimed, rescheduled or replanned. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
| 申请公布号 |
JP2005340848(A) |
申请公布日期 |
2005.12.08 |
| 申请号 |
JP20050181179 |
申请日期 |
2005.05.25 |
| 申请人 |
ASML NETHERLANDS BV |
发明人 |
NORBERTUS JOSEPHUS MARTINUS VAN DEN NIEUWELAAR;ONVLEE JOHANNES;BOUMEN ROEL;HENRICUS PETRUS JOHANNUS VAN LIEROP;ROBERT DUMONT;ROODA JACOBUS E |
| 分类号 |
H01L21/027;G03F7/20;G05B19/418;G06F19/00 |
主分类号 |
H01L21/027 |
| 代理机构 |
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