FILM-FORMING INK AND METHOD FOR FORMING FILM

摘要

PROBLEM TO BE SOLVED: To provide a film-forming ink which can form films of metallic ruthenium and/or ruthenium oxide at a lower temperature capable of forming the films even on a resin film substrate such as polyimides, and to provide a method for forming films using the same.

SOLUTION: The film-forming ink contains a compound obtained by preheating in an alcohol at least one selected from the group consisting of aβ-diketone complex, aβ-ketoester complex and aβ-diester complex of Ru(III) as an essential ingredient. The method for forming films comprises fixing metallic ruthenium and/or ruthenium oxide, formed by coating the film-forming ink on a substrate and heating the coated ink, to the surface of the substrate as a film.

COPYRIGHT: (C)2006,JPO&NCIPI