发明名称 |
Electrical fuses as programmable data storage |
摘要 |
An electrical fuse is disclosed. It is formed by a silicide layer on a polysilicon layer, with a first dielectric section separating the electrical fuse from a semiconductor substrate and a second dielectric section separating the electrical fuse from at least one electrical conductor directly above the fuse. The polysilicon layer is at least 2000 Angstroms in thickness and no more than 0.14 um in width and the second dielectric section contains substantially low-K materials.
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申请公布号 |
US2005269666(A1) |
申请公布日期 |
2005.12.08 |
申请号 |
US20050056041 |
申请日期 |
2005.02.11 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
CHUNG SHINE C.;LOU CHINE-GIE |
分类号 |
H01L21/82;H01L23/525;H01L23/62;H01L27/10;H01L29/00;(IPC1-7):H01L29/00 |
主分类号 |
H01L21/82 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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