A MEANS FOR CALIBRATING A MICROSCOPE, A METHOD OF PREPARING THE MEANS AND A METHOD OF CALIBRATING A MICROSCOPE

摘要

A means or artefact for calibrating the height/depth or Z axis of a microscope, such as a confocal microscope, an interference microscope or a Scanning Electron Microscope. The artefact comprises a number of tapering or pie-shaped, parallel surfaces each extending from a central axis, whereby all surfaces and heights are visible independently of the magnification of the microscope. Thus, the full height range may be calibrated and the linearity thereof checked independently of the magnification.