| 摘要 |
PROBLEM TO BE SOLVED: To provide a multiple patterning ceramic substrate capable of mounting precisely and certainly electronic devices, such as a semiconductor device and resistance to each partition of a large-sized ceramic mother board, without a careless occurrence of a crack in a ceramic mother substrate, even if a force is added from the exterior at the time of conveyance or mounting an electronic device or the like. SOLUTION: The multiple patterning ceramic substrate is constituted such that; dividing grooves 2 for dividing a mother ceramic substrate 1 into two or more partitions may be formed and estranged from the perimeter of the mother ceramic substrate 1, on at least one principal surface of two or more plate-shaped mother ceramic substrates; and a large number of holes 4, whose depth is deeper than the dividing grooves 2 and wider than the dividing grooves 2 between the both ends of the division grooves 2 and the periphery, may be formed in communication with first grooves 1. The many holes 4 are arranged so that the line which connects them may become a zigzag line path. COPYRIGHT: (C)2006,JPO&NCIPI
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