| 摘要 |
PROBLEM TO BE SOLVED: To provide technology to obtain an EL element having good characteristics and a long life. SOLUTION: When a coil 7 in which a target 9 comprising a cathode electrode film material is disposed is provided in a vacuum tank to form a cathode electrode film 14 on the surface of an organic thin film 13 on a substrate 3 by a spattering method, the distance (d) between the upper end part of the coil 7 and the substrate is set at 200 mm or longer, and the frequency of an ac voltage impressed on the coil 7 is set within a range of 13.56-100 MHz. Since no electron and no ion enters into the substrate 3, damage of the organic thin film 13 can be reduced. At the initial stage of forming the cathode electrode film 14, the pressure in the vacuum tank is set at 1.33×10<SP>-2</SP>Pa or less to reduce damage of the interface of the cathode electrode film 14 and the organic thin film 13, and if an amount of spattering gas to be introduced is increased when the 20-50Åof the cathode electrode film is formed, a film deposition speed is enhanced. COPYRIGHT: (C)2006,JPO&NCIPI
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