发明名称 Method of manufacturing semiconductor device
摘要 A method of manufacturing a semiconductor device includes: (a) forming an insulating layer having a contact hole on a semiconductor section in which an element is formed; (b) forming an electrode pad on the insulating layer so that a depression or a protrusion remains at a position at which the electrode pad overlaps the contact section; (c) forming a passivation film to have an opening on a first section of the electrode pad and to be positioned on a second section of the electrode pad; (d) forming a barrier layer on the electrode pad; and (e) forming a bump to be larger than the opening in the passivation film and to be partially positioned on the passivation film. The contact section is connected with the second section at a position within a range in which the contact section overlaps the bump while avoiding the first section of the electrode pad.
申请公布号 US2005272243(A1) 申请公布日期 2005.12.08
申请号 US20050142439 申请日期 2005.06.02
申请人 SEIKO EPSON CORPORATION 发明人 YUZAWA TAKESHI;YUZAWA HIDEKI;TAKANO MICHIYOSHI
分类号 H01L23/52;H01L21/3205;H01L21/44;H01L21/60;H01L21/70;H01L23/485;(IPC1-7):H01L21/44 主分类号 H01L23/52
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