Protective cover for a lamp, set including a lamp and a protective cover, method of installing a source in a lithographic apparatus, device manufacturing method and device manufactured thereby

摘要

A protective cover for a lamp is flexible and made of a material that has a tensile strength so that the protective cover is impermeable to fragments produced from the lamp when the lamp breaks when covered by the protective cover. The protective cover is used to install the discharge lamp in a source and removed from the lamp after installing the lamp.