| 发明名称 |
FIXED ABRASIVE ARTICLE FOR USE IN MODIFYING A SEMICONDUCTOR WAFER |
| 摘要 |
<p>An abrasive article that includes a fixed abrasive element having a plurality of abrasive particles, a resilient element, and a plurality of rigid segments disposed between the fixed abrasive element and the resilient element.</p> |
| 申请公布号 |
EP1360034(B1) |
申请公布日期 |
2005.12.07 |
| 申请号 |
EP20010948459 |
申请日期 |
2001.06.19 |
| 申请人 |
3M INNOVATIVE PROPERTIES COMPANY |
发明人 |
GOETZ, DOUGLAS, P. |
| 分类号 |
B24B37/00;B24B37/22;B24B37/24;B24D3/00;B24D13/12;B24D13/14;H01L21/304;(IPC1-7):B24B37/04 |
主分类号 |
B24B37/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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