| 发明名称 |
IMPROVED FAN FOR GAS DISCHARGE LASER |
| 摘要 |
An electric discharge laser apparatus having a laser chamber containing a laser gas and two longitudinal electrodes defining a discharge region for producing electrical discharges and a tangential fan for circulating the laser gas and having blade members configured to minimize adverse effects of reflections of electric discharge generated shock waves back to the discharge region simultaneously with a subsequent discharge. |
| 申请公布号 |
EP1386378(A4) |
申请公布日期 |
2005.12.07 |
| 申请号 |
EP20020769663 |
申请日期 |
2002.04.18 |
| 申请人 |
CYMER, INC. |
发明人 |
PARTLO, WILLIAM, N.;RETTIG, CURTIS, L. |
| 分类号 |
F04D17/04;F04D29/28;F04D29/66;G03F7/20;H01S3/036;H01S3/038;H01S3/04;H01S3/041;H01S3/08;H01S3/097;H01S3/0971;H01S3/0975;H01S3/102;H01S3/104;H01S3/105;H01S3/11;H01S3/13;H01S3/139;H01S3/22;H01S3/223;H01S3/225 |
主分类号 |
F04D17/04 |
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