Magnetic field detecting element and method for manufacturing the same
摘要
A method for manufacturing a magnetic field detecting element comprises the steps of: forming a well (211) of a predetermined depth on the semiconductor substrate (200). A first coil (250) is formed in an inside of the well (211) and a soft magnetic core (220) is formed on an upper part of the first coil (250) with a first insulating film (230) intervened. A second coil (260) is formed on an upper part of the soft magnetic core (220) with a second insulating film (240) intervened. <IMAGE>