发明名称 Magnetic field detecting element and method for manufacturing the same
摘要 A method for manufacturing a magnetic field detecting element comprises the steps of: forming a well (211) of a predetermined depth on the semiconductor substrate (200). A first coil (250) is formed in an inside of the well (211) and a soft magnetic core (220) is formed on an upper part of the first coil (250) with a first insulating film (230) intervened. A second coil (260) is formed on an upper part of the soft magnetic core (220) with a second insulating film (240) intervened. <IMAGE>
申请公布号 EP1602936(A1) 申请公布日期 2005.12.07
申请号 EP20050076754 申请日期 2004.02.24
申请人 SAMSUNG ELECTRONICS CO., LTD 发明人 SHIM, DONG-SIK;NA, KYUNG-WON;CHOI, SANG-ON;PARK, HAE-SEOK;HWANG, JUN-SIK
分类号 G01R33/02;G01R33/028;G01R33/04;G01R33/05;H01F17/00;H01F41/04;H01F41/14;H01F41/34;H01L43/00;(IPC1-7):G01R33/028 主分类号 G01R33/02
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