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发明名称
SYSTEM AND METHOD FOR BURIED ELECTRICAL FEEDTHROUGHS IN A GLASS-SILICON MEMS PROCESS
摘要
申请公布号
EP1601611(A1)
申请公布日期
2005.12.07
申请号
EP20040719227
申请日期
2004.03.10
申请人
HONEYWELL INTERNATIONAL INC.
发明人
HORNING, ROBERT, D.;RIDLEY, JEFFREY, A.
分类号
B81B7/00;(IPC1-7):B81C1/00
主分类号
B81B7/00
代理机构
代理人
主权项
地址
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