发明名称 |
Lithography apparatus and pattern forming method using the same |
摘要 |
<p>A lithography apparatus is provided. The apparatus includes: a stage, a first light source unit, an optical system, an image obtaining means, an image edit means, an LC panel, and a second light source unit. The LC panel is coupled with the optical system and receives a signal of the image edited by the image edit means and displays the received image to perform a photo mask function. The second light source unit provides light used in performing an exposure on the test material using the imaged displayed on the LC panel for a photo mask.</p> |
申请公布号 |
EP1602979(A2) |
申请公布日期 |
2005.12.07 |
申请号 |
EP20050011284 |
申请日期 |
2005.05.25 |
申请人 |
LG ELECTRONICS, INC. |
发明人 |
LEE, KI DONG;AHN, SEH WON;PIEH, SUNG HOON;PARK, BYOUNG HO;KIM, GYU TAE |
分类号 |
G02F1/13;G03F1/84;G03F7/20;H01L21/027;H01L21/28;H01L21/3205;H01L21/768;H01L23/52;H01L23/522;(IPC1-7):G03F7/20 |
主分类号 |
G02F1/13 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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