发明名称 |
Method and apparatus for reducing charge injection in control of MEMS electrostatic actuator array |
摘要 |
A control circuit for a MEMS (Micro-Electro-Mechanical System) has a semiconductor switch which has a source, a drain and a gate, which is associated with a selected one of spatially arranged fixed and movable plates of a variable capacitor, and is arranged to selectively connect the selected one of the fixed and movable plates with a voltage source. A charge injection control circuit is associated with the semiconductor switch and attenuates current injection into the selected one of the fixed and movable plates of the capacitor.
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申请公布号 |
EP1603105(A2) |
申请公布日期 |
2005.12.07 |
申请号 |
EP20050009243 |
申请日期 |
2005.04.27 |
申请人 |
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P. |
发明人 |
MARTIN, ERIC T.;PIEHL, ART;GHOZEIL, ADAM |
分类号 |
G09G3/34;H03B1/00;H03K17/30;(IPC1-7):G09G3/34 |
主分类号 |
G09G3/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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