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发明名称
A method for forming storage node of inner capacitor
摘要
申请公布号
KR100533969(B1)
申请公布日期
2005.12.07
申请号
KR20000058275
申请日期
2000.10.04
申请人
发明人
分类号
H01L27/108;H01L21/02;H01L21/311;H01L21/316;H01L21/768;H01L21/8242;(IPC1-7):H01L27/108
主分类号
H01L27/108
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代理人
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