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发明名称
Cleaning method for containers for containing a resist and its apparatus
摘要
申请公布号
KR100533435(B1)
申请公布日期
2005.12.06
申请号
KR19990026558
申请日期
1999.07.02
申请人
发明人
分类号
B08B3/04;B08B3/08;B08B9/30;B08B9/42;C11D3/20;C11D3/43;(IPC1-7):B08B3/04
主分类号
B08B3/04
代理机构
代理人
主权项
地址
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