发明名称 Apparatus and method for electrical testing of electrical circuits
摘要 Apparatus for electrical testing of electrical circuits includes an array of probes arranged for selective engagement with portions of electrical circuits to be tested, testing circuitry associated with the array of probes for sensing electrical characteristics of the electrical circuits engaged by the array of probes, and control circuitry associated with the array of probes for causing engagement between selected ones of the array of probes with selected ones of the portions of electrical circuits to be tested. The array of probes includes at least two static probe assemblies arranged in a fixed array, and the static probe assemblies include a selectively positionable probe element and a probe element positioner. The apparatus is employed to test electrical circuits during fabrication.
申请公布号 US6973406(B2) 申请公布日期 2005.12.06
申请号 US20030737863 申请日期 2003.12.18
申请人 ORBOTECH LTD. 发明人 ZEMER DAN;HAREL EYAL
分类号 G01R1/06;G01R1/067;G01R31/28;(IPC1-7):G01R31/00 主分类号 G01R1/06
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