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发明名称
Method of forming vertical line of semiconductor device provided with plug-poly
摘要
申请公布号
KR100533378(B1)
申请公布日期
2005.12.06
申请号
KR19990026537
申请日期
1999.07.02
申请人
发明人
分类号
H01L21/3205;(IPC1-7):H01L21/320
主分类号
H01L21/3205
代理机构
代理人
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