| 摘要 |
An object of the present invention is to provide a ceramic heater 2 having a ceramic sintered body 4 and a heat resistor embedded in the substrate, in which the change of the uniformity of temperature on the heating face may be reduced. The heat resistor 5A or 5B contains a metal comprising one or more metal element selected from the group consisting of IVa, Va and VIa elements of the Periodic Table and a carbide of the metal. A ratio (Ic/Im) of a total (Ic) of main peak strength of the metal carbide to a total (Im) of main peak strength of the metal being not larger than 0.2, measured by means of an X-ray diffraction method. Alternatively, (Rb-Ra)/Ra is not larger than 30 percent, where "Ra" is a resistance of the heat resistor before a sintering step and "Rb" is a resistance of the heat resistor after the sintering step. |
