发明名称 |
GYRO-SENSOR COMPRISING PLURAL COMPONENT UNIT, AND FABRICATING METHOD THEREOF |
摘要 |
Provided are a gyro-sensor including a plurality of component units and a method of fabricating the gyro-sensor. The gyro-sensor includes: a substrate; a micro electro mechanical system structure including a surface including a predetermined area in which a cavity is formed and connected to an upper surface of the substrate to output a vibration signal proportional to an external rotation force; and a circuit unit positioned in the cavity, converting the vibration signal into a predetermined electric signal proportional to a circular angular velocity, and outputting the predetermined electric signal. |
申请公布号 |
KR20050114458(A) |
申请公布日期 |
2005.12.06 |
申请号 |
KR20040039680 |
申请日期 |
2004.06.01 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
PARK, TAE SIK;LEE, MOON CHUL;MOON, CHANG YOUL |
分类号 |
G01P9/04;B81B3/00;B81B7/00;B81C3/00;G01C19/00;G01C19/56 |
主分类号 |
G01P9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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