| 发明名称 |
Atomic beam to protect a reticle |
| 摘要 |
Embodiments of the invention provide a beam generator to produce an atomic beam that travels across a patterned surface of a reticle. The beam may interact with particles to prevent the particles from contaminating the reticle.
|
| 申请公布号 |
US6972420(B2) |
申请公布日期 |
2005.12.06 |
| 申请号 |
US20040835480 |
申请日期 |
2004.04.28 |
| 申请人 |
INTEL CORPORATION |
发明人 |
SILVERMAN PETER J. |
| 分类号 |
G03F7/20;H05H3/02;(IPC1-7):G21G5/00;G01N23/00 |
主分类号 |
G03F7/20 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
