| 摘要 |
An electrode pad provided on a tape such as a TAB tape or a COF tape is inspected with high accuracy. Probes (21) generally vertically provided to a probe unit (2) are brought from a generally vertical direction into contact with electrode pads (11) in circuit pattern formation regions (10, 10a) provided at predetermined intervals on a tape (1) so as to make an electrical inspection. The probe unit (2) has mark check holes (25) corresponding to alignment marks (13a, 13b, 13c, 13d) made on the surface of the tape and corresponding to the respective circuit pattern formation regions (10, 10a). A camera (31) is disposed on the opposite side to the probe unit (2) with the tape (1) therebetween. The relative positions of the probe unit (2) and the tape (1) are so adjusted that an alignment mark can be viewed inside the corresponding mark check hole (25) while observing them through the camera (31).
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