| 摘要 |
PROBLEM TO BE SOLVED: To provide an electron beam irradiating device capable of restraining the loss of an irradiated material by suppressing abrupt stopping of the device. SOLUTION: This electron beam irradiating device, provided adjacent with a beam line tube 13 provided with an acceleration tube 12 and a scanning magnet 131 onto an electron beam source 11, and a scanning tube 14, in this order, is provided with a temperature sensor TS for detecting a temperature of the beam line tube 13, an overheating restraining device (auxiliary exhauster 16 or the like) for restraining overheating by electron collision onto a beam line tube wall, and a control part (CONT1 or the like) for the overheating retraining device, and the control part indicates an operation to the overheating retraining device, when a detected temperature by the temperature sensor TS exceeds a set temperature, in the electron beam irradiation devices 1A-1D. COPYRIGHT: (C)2006,JPO&NCIPI
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