| 摘要 |
PROBLEM TO BE SOLVED: To provide a 6 axis force sensor capable of reducing a cost as well as attaining miniaturization of diameter of the external force detection device. SOLUTION: The relative displacement of a force receiving part 23 to a supporting part 22 is detected by the optical displacement sensors provided with three light receivers 1a, 1b, and 1c. In an external force detection device 20 for calculating the external force impressed relatively on the supporter part and the receiver part, the optical displacement sensor comprises a light source 2 arranged on the center axis radiating light in a center axis direction, a light branching body 3 arranged successively on the center axis and a light reflector 4, and the three light receiving elements arranged on the outer periphery of the support part having rotational symmetries through 120 degrees, each light receiving face of which is facing toward center axis of the force receiving part. The relative displacement of the force receiving part to the supporting part is detected, based on the light receiving result of the three light receiving elements. COPYRIGHT: (C)2006,JPO&NCIPI
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