| 摘要 |
PROBLEM TO BE SOLVED: To provide a preparation method of a sample for observation, an observation method of the sample, the sample for observation, an observation device or the like capable of observation by TEM or FIB, even when an observation object is a molding prior to sintering, a porous body or the like having a weak shape-retaining force. SOLUTION: A resin 3 is applied to an observation object 2 and stored in a chamber 10, and the chamber 10 is evacuated, to thereby draw the resin 3 into even a void of the observation object 2. Then, the resin 3 is hardened, and prescribed polishing, such as mechanical polishing or ion polishing, is applied to the observation surface of the observation object 2, to thereby form a sliced sample for observation having the thickness of 100 nm or less. Accordingly, the sample for observation observable by TEM or FIB can be acquired from the observation object 2 taken out, before reaching a prescribed baking temperature after start of baking. COPYRIGHT: (C)2006,JPO&NCIPI
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