| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor improved in reliability by reducing the error of the angular velocity caused by the acceleration of an oscillator to its moving direction. <P>SOLUTION: An oscillator 22 of a tuning fork type is provided with a shaft part 28 having a pair of arms 30 formed of a piezoelectric element. A main body 26 constituted of IC 27 for controlling the oscillator 22 and for detecting the angular velocity, a substrate 32 for mounting the IC 27 and for supporting the oscillator 22, and a first correction circuit 35 for correcting the Coriolis force caused by imbalance of mass of a pair of arms 30 if the acceleration is generated in a moving direction of the oscillator 22, and the case 34 for storing the IC 27, substrate 32, and the first correction circuit 35. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
