| 摘要 |
PROBLEM TO BE SOLVED: To provide a support plate formed of synthetic resin whose material cost can be reduced, which can be lightened compared to a plate formed of glass and can be enlarged, and which can prevent damage due to falling at the time of conveyance or handling due to weight increase. SOLUTION: The support plate 5 (basic thickness: 1mm, variation: within 15μm and bending elastic modulus: 25MPa) formed of polycarbonate is slightly bent. A wafer 3 is stuck to an adhesion layer 4 while an air layer between the wafer 3 and the adhesion layer 4 is removed. Bubbles are prevented from remaining between the wafer 3 and the adhesion layer 4. The wafer 3 is stuck to the support plate 5 by making a diced face side up. The wafer 3 supported by the support plate 5 is diced into a prescribed size by a dicing blade. Since the support plate is formed of synthetic resin, material cost can be reduced, and the support plate can be lightened compared to the plate formed of glass. Thus, the support plate can be enlarged. COPYRIGHT: (C)2006,JPO&NCIPI |
