DROPLET DISCHARGE METHOD AND APPARATUS USING WORK PROCESSING APPARATUS, PLOTTING METHOD AND APPARATUS USING DROPLET DISCHARGE APPARATUS, METHOD OF MANUFACTURING ELECTRO-OPTICAL DEVICE, ELECTRO-OPTICAL DEVICE AND ELECTRONIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide droplet discharge apparatus or the like using a work processing apparatus capable of increasing or decreasing the diameter of the functional droplet landed on a work compared to that fixed by the liquid quantity of the functional droplet and the contact angle with the work surface. SOLUTION: In the droplet discharge method using the work processing apparatus 1 for discharging and landing the functional droplets of a plurality of shots to the almost same point of the work W from a functional droplet discharge head 16 having a nozzle 75 capable of controlling the discharge timing, a 2nd functional droplet is landed on the 1st functional droplet in which a vertical axis is deformed long or short after landed on the work W with a timing when the deformation is changed to be short. COPYRIGHT: (C)2006,JPO&NCIPI