| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic attraction driver arranged to move a mover stably by reducing frictional resistance between the stator and the mover. SOLUTION: When a predetermined voltage is applied to a stator side electrode 23, a mover is moved in the moving direction (Y direction) by electrostatic attraction being generated between the stator side electrode 23 and a mover side electrode 33. Since the mover 30 is guided in the moving direction through rolling of balls 41 and 41 provided between a guide groove 21 on the stator 20 side and holding grooves 34 and 34 on the mover 30 side, sliding friction can be reduced between the stator 20 and the mover 30. Since electrostatic attraction can be utilized efficiently, the mover can be driven with high efficiency. COPYRIGHT: (C)2006,JPO&NCIPI
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