| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for examining vibration characteristics of a double T-shaped piezoelectric vibration gyro element while giving as little hindrance as possible to the vibration of a vibration arm. <P>SOLUTION: The piezoelectric vibration gyro element is provided with a central support part 3, a pair of detection vibration arms 4 extended from the central support part, a pair of coupling arms 5a and 5b extending orthogonally to the detection vibration arms from the central support part, a pair of driving vibration arms 7a and 7b extended orthogonally from the tips of the respective coupling arms, and connection electrode pads 12-17 formed on the central support part surface. For examining vibration characteristics of this piezoelectric vibration gyro element 2, a configuration of the piezoelectric vibration gyro element is machined in a piezoelectric wafer 1 while leaving coupling parts 18-21 to a frame part 22 of the piezoelectric wafer, and on the configuration surface, a detection electrode, a driving electrode, and an electrode pad, and a wire connecting them mutually are formed, while examination electrode pads 31-36 matching the respective connection electrode pads are formed on the frame part surface. Vibration characteristics of the detection vibration arm or the driving vibration arm are measured by connecting the examination electrode pads to the connection electrode pads via the coupling parts and bringing the examination probes 43-48 into contact with the respective examination electrode pads. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
