| 摘要 |
<P>PROBLEM TO BE SOLVED: To control two drive means so as not to produce rotary motions when driving two drive means in parallel. <P>SOLUTION: A control system 60 has a coordinate conversion block 70, a translational direction control system 80 for applying feedback control on a Y1 linear motor 20A, a yawing direction control system 90 for applying feedback control on a Y2 linear motor 20B, and a thrust non-interferential block 100. Even though translational direction disturbance d<SB>1</SB>and rotary direction disturbance d<SB>2</SB>are entered into the translational direction control system 80 and the yawing direction control system 90, the linear motors 20A and 20B can produce driving force F<SB>1</SB>and F<SB>2</SB>receiving no influence of disturbance so that presumed disturbance component is removed from a Y direction translational thrust directive value u<SB>y</SB>, and θ direction thrust directive value u<SB>θ</SB>by a translational disturbance observer 82 and a rotary disturbance observer 92. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
