发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device, especially using a TFT having an LDD region, represented by a TFT manufacturable in a simplified process, and a liquid crystal display and an EL display, and their manufacturing methods. SOLUTION: The semiconductor device comprises a channel region, a semiconductor layer composed of a pair of impurity regions and a pair of low-concentration impurity layers, and a gate electrode layer of a monolayer structure or laminated layer structure having film thickness differences which is contacted with the semiconductor layer via a gate insulation film. The gate electrode layer having film thickness differences is easily formed by the liquid-drop discharge method, the advantage of which is utilized to its maximum. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005333118(A) 申请公布日期 2005.12.02
申请号 JP20050114330 申请日期 2005.04.12
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 JINNO YOHEI;WATANABE YASUKO
分类号 G02F1/1368;H01L21/288;H01L21/336;H01L29/417;H01L29/786;H01L51/50;H05B33/14;(IPC1-7):H01L21/336;G02F1/136 主分类号 G02F1/1368
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