| 摘要 |
PROBLEM TO BE SOLVED: To provide a linear motor actuator which can suppress the speed ripple of a carried body at low-speed movement of a slide carriage as much as possible and can be used in application where the constantization of the travel speed of the carried object is strictly requested. SOLUTION: The slide carriage includes a single slider which is set to truck rails via many rollers and can freely reciprocate along the truck rails. A coil member and a movable stage are stacked on this slider. It is so arranged as to fulfill the condition ofω≤0.926 (mrad/s), in case that the angular velocity of the pitching of the above slide carriage arising by the shift isω, when having shifted the above slide carriage at a command velocity of 10 mm/s. COPYRIGHT: (C)2006,JPO&NCIPI
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