| 摘要 |
PROBLEM TO BE SOLVED: To provide an efficient electrostatic actuator by controlling the drive signal thereof depending on the state of a load. SOLUTION: The electrostatic actuator comprises a stator 102 having drive electrodes 106 arranged at a predetermined pitch, a mover 101 having the finger portions 104-2, 105-2 of stripe electrode patterns 104 and 105 arranged at a predetermined pitch, a polyphase drive pulse source connected with the drive electrode 106 and having a periodically varying output voltage, a sensing electrode 107 secured for the stator 102, and a potential measuring circuit connected with the sensing electrode 107 and detecting potential variation, wherein the mover 101 is displaced by an electrostatic force acting between the drive electrodes 106 and the mover 101. Furthermore, a control circuit for comparing the drive signal of the drive pulse power supply with the output signal from the potential measuring circuit which varies as the mover 101 displaces is provided. COPYRIGHT: (C)2006,JPO&NCIPI
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