| 摘要 |
PROBLEM TO BE SOLVED: To improve the efficiency for reflux cleaning the inside of a reaction vessel. SOLUTION: This heat exchange system 30 for heating or cooling the reaction vessel 10 is provided with: an upper part jacket 14 and a lower part jacket 16 which are provided so as to be in contact with the reaction vessel 10; a pipe line 32a for supplying a high temperature heating medium to the upper part jacket 14; a pipe line 32b for supplying a low temperature heating medium to the upper part jacket 14; a pipe line 32c for supplying a high temperature heating medium to the lower part jacket upper part 16; a pipe line 32d for supplying a low temperature heating medium to the lower part jacket 16; and control parts 38b and 38b for controlling the supply of the heating medium. For reflux cleaning, the low temperature heating medium is supplied to the upper part jacket 14 and the high temperature heating medium is supplied to the lower part jacket 16. COPYRIGHT: (C)2006,JPO&NCIPI
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